Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers.
| Autor: | Larivière, Stéphane, Wilson, Christopher J., Kotowska, Bogumila Kutrzeba, Versluijs, Janko, Decoster, Stefan, Mao, Ming, van der Veen, Marleen H., Jourdan, Nicolas, El-Mekki, Zaid, Heylen, Nancy, Kesters, Els, Verdonck, Patrick, Béral, Christophe, Den Heuvel, Dieter Van, De Bisschop, Peter, Bekaert, Joost, Blanco, Victor, Ciofi, Ivan, Wan, Danny, Briggs, Basoene |
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| Zdroj: | Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-13, 13p |
| Databáze: | Complementary Index |
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