EUV vote-taking lithography: Crazy... or not ?

Autor: Bekaerta, Joost, De Bisschopa, Peter, Beral, Christophe, Hendrickx, Eric, van de Kerkhof, Mark A., Bouten, Sander, Kupers, Michiel, Schiffelers, Guido, Verduijn, Erik, Brunner, Timothy A.
Zdroj: Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-17, 17p
Databáze: Complementary Index