| Autor: |
Ferdous Shaun, Sreyash Sarkar, Frederic Marty, Patrick Poulichet, William Cesar, Elyes Nefzaoui, Tarik Bourouina |
| Předmět: |
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| Zdroj: |
Journal of Micromechanics & Microengineering; Jul2018, Vol. 28 Issue 7, p1-1, 1p |
| Abstrakt: |
We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimized under the following constraints: low power consumption and high sensitivity, while employing a large thermal conductivity substrate, namely silicon. The resulting device consists of a platinum resistive heater deposited on a thin silicon pillar ~100 µm high and 5 µm wide in the middle of a nearly 100 µm wide cavity. Operated under the anemometric scheme, the reported sensor shows a larger sensitivity in the velocity range up to 1 m s−1 compared to different sensors based on similar high conductivity substrates such as bulk silicon or silicon membrane with a power consumption of 44 mW. Obtained performances are assessed with both CFD simulation and experimental characterization. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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