A novel patterning control strategy based on real-time fingerprint recognition and adaptive wafer level scanner optimization.
| Autor: | Cekli, Hakki Ergun, Nije, Jelle, Ypma, Alexander, Bastani, Vahid, Sonntag, Dag, Niesing, Henk, Linmiao Zhang, Ullah, Zakir, Subramony, Venky, Somasundaram, Ravin, Susanto, William, Matsunobu, Masazumi, Johnson, Jeff, Tabery, Cyrus, Chenxi Lin, Yi Zou |
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| Zdroj: | Proceedings of SPIE; 2018, Vol. 10585, p1-11, 11p |
| Databáze: | Complementary Index |
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