Approaches of multilayer overlay process control for 28nm FD-SOI derivative applications.
| Autor: | Duclaux, Benjamin, De Caunes, Jean, Perrier, Robin, Gatefait, Maxime, Le Gratiet, Bertrand, Chapon, Jean-Damien, Monget, Cédric |
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| Zdroj: | Proceedings of SPIE; 2018, Vol. 10585, p1-13, 13p |
| Databáze: | Complementary Index |
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