Unique method for controlling device level overlay with high NA optical overlay technique using YieldStar in a DRAM HVM environment.
| Autor: | Dong-Kiu Park, Hyun-Sok Kim, Moo-Young Seo, Jae-Wuk Ju, Young-Sik Kim, Shahrjerdy, Mir, van Leest, Arno, Soco, Aileen, Miceli, Giacomo, Massier, Jennifer, Namara, Elliott Mc, Hinnen, Paul, Böcker, Paul, Nang-Lyeom Oh, Sang-Hoon Jung, Yvon Chai, Jun-Hyung Lee |
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| Zdroj: | Proceedings of SPIE; 2018, Vol. 10585, p1-9, 9p |
| Databáze: | Complementary Index |
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