Unique method for controlling device level overlay with high NA optical overlay technique using YieldStar in a DRAM HVM environment.

Autor: Dong-Kiu Park, Hyun-Sok Kim, Moo-Young Seo, Jae-Wuk Ju, Young-Sik Kim, Shahrjerdy, Mir, van Leest, Arno, Soco, Aileen, Miceli, Giacomo, Massier, Jennifer, Namara, Elliott Mc, Hinnen, Paul, Böcker, Paul, Nang-Lyeom Oh, Sang-Hoon Jung, Yvon Chai, Jun-Hyung Lee
Zdroj: Proceedings of SPIE; 2018, Vol. 10585, p1-9, 9p
Databáze: Complementary Index