FABRICATION OF NANODIMENSIONAL OBJECTS BY ATOMIC-FORCE LITHOGRAPHY METHODS.

Autor:	DRYAKHLUSHIN, V. F., KLIMOV, A. Yu., ROGOV, V. V., SHASHKIN, V. I., SUKHODOEV, L. V., VOLGUNOV, D. G., VOSTOKOV, N. V.
Předmět:	ATOMIC force microscopy LITHOGRAPHY SCANNING probe microscopy BIPOLAR transistors PLASMA etching
Zdroj:	Physics, Chemistry & Application of Nanostructures: Reviews & Short Notes To Nanomeeting '99; 1999, p295-297, 3p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu