FORMATION OF POROUS SILICON NANOSTRUCTURES BY METAL-ASSISTED CHEMICAL ETCHING.

Autor: NIAUZORAU, S., GIREL, K., DOLGYI, L., BONDARENKO, V.
Předmět:
Zdroj: Physics, Chemistry & Applications of Nanostructures - Proceedings of the International Conference Nanomeeting - 2015; 2015, p365-368, 4p
Databáze: Complementary Index