ACCURATE ANALYSIS OF SPURIOUS MODES IN ALUMINUM NITRIDE FILM RESONATORS.

Autor: Xun GONG, Xiao-Li SHANG, Jun XIONG, Jie DUAN, De ZHANG
Předmět:
Zdroj: Piezoelectricity, Acoustic Waves & Device Applications - Proceedings of the 2006 Symposium; 2007, p244-249, 6p
Databáze: Complementary Index