Fabrication of MEMS cantilever using laser micromachine.
| Autor: | S. Johari, M. Z. Zainol, A. A. Azman, M. Mazalan, Y. Wahab |
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| Zdroj: | IOP Conference Series: Materials Science & Engineering; Mar2018, Vol. 340 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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