Visualization of Defects on the Semiconductor Surface Using a Dielectric Barrier Discharge.

Autor:	Sitanov, D. V., Pivovarenok, S. A.
Předmět:	SEMICONDUCTOR surfaces SURFACE defects ELECTRIC discharges
Zdroj:	Russian Microelectronics; Jan2018, Vol. 47 Issue 1, p34-39, 6p
Abstrakt:	It is demonstrated that plasma techniques can be used to detect various defects on a solid surface by a self-sustained discharge under atmospheric pressure. Special attention is paid to controlling surface defects and the end cleavages of semiconducting wafers and pinholes of layered structures. [ABSTRACT FROM AUTHOR]
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink