Sputtering of redeposited material in focused ion beam silicon processing.
| Autor: | Nikolay I Borgardt, Alexander V Rumyantsev, Roman L Volkov, Yuri A Chaplygin |
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| Zdroj: | Materials Research Express; Feb2018, Vol. 5 Issue 2, p1-1, 1p |
| Databáze: | Complementary Index |
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