| Autor: |
Akin Yildirim, Yagmur, Toprak, Alperen, Tigli, Onur |
| Předmět: |
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| Zdroj: |
Journal of Microelectromechanical Systems; Feb2018, Vol. 27 Issue 1, p86-94, 9p |
| Abstrakt: |
This paper presents the design, fabrication, and performance evaluation of a biocompatible piezoelectric membrane actuator (PMA) using polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Electrode structure optimization was verified by a finite element method simulation software. Fabrication was done utilizing only standard microfabrication techniques. 1- \mu \textm -thick membrane and 1.5- \mu \textm -thick actuator layers were formed by spin coating using PVDF-TrFE. The surface roughness of the fabricated film was measured as 7.9 nm using a tabletop atomic force microscope (AFM) and remnant polarization at 200 V was measured as 5.38 \mu \textC /cm2. Deflection measurements were performed with an Al coated tipless AFM probe using a precision nano displacement system, which consists of a ferroelectric tester, a table top AFM, and a computer. A 432 nm displacement was obtained at 9 V under non-resonant conditions from a PMA with 2250 \mu \textm diameter. Since all moving structures were fabricated from a polymer material, high displacements could be obtained without fracture. The results demonstrated that the proposed PMA can be a good candidate for membrane type micropumps, especially to be used in biomedical applications, where low driving voltage and biocompatibility are required. [2017-0128] [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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