| Autor: |
Hansson, B. A. M., Berglund, M., Hemberg, O., Hertz, H. M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 4/15/2004, Vol. 95 Issue 8, p4432-4437, 6p, 2 Black and White Photographs, 1 Diagram, 2 Charts, 3 Graphs |
| Abstrakt: |
We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser–plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser–plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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