Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation.
| Autor: | Chupeng Zhang, Huiying Zhao, Yawen Gu, Xinxing Ban, Chunye Jiang |
|---|---|
| Zdroj: | Proceedings of SPIE; 8/12/2017, Vol. 10448, p1-13, 13p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|