Improved Etch Characteristics of Magnetic Tunneling Junction Materials by Using Helium.
| Autor: | Sungwoo Park, Kyungchae Yang, Hoseok Lee, Dongwoo Kim, Jongung Baek, Taehun Shim, Jeagun Park, Geunyoung Yeom |
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| Zdroj: | ECS Journal of Solid State Science & Technology; 2017, Vol. 6 Issue 9, pN148-N154, 7p |
| Databáze: | Complementary Index |
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