INO MEMS Foundry.
| Autor: | Alain, Christine, Jerominek, Hubert, Picard, Francis, Pope, Timothy D., Topart, Patrice, Cayer, Félix, Larouche, Carl, Tremblay, Bruno |
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| Zdroj: | Proceedings of SPIE; 3/30/2017, Vol. 10313, p202-204, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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