Novel Three Dimensional Masking Techniques for Integrated Photonic Devices Fabrication Using Low Energy Ion Implantation Induced Quantum Well Intermixing.
| Autor: | Aimez, Vincent, Beauvais, Jacques, Beerens, Jean, Hwi Siong Lim, Boon Siew Ooi |
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| Zdroj: | Proceedings of SPIE; 3/30/2017, Vol. 10313, p190-192, 3p |
| Databáze: | Complementary Index |
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