Silicon Micromachining with Solid-State Diode-Pumped Lasers.

Autor: Nantel, Marc, Yashkir, Yuri, Seong-Kuk Lee, Hockley, Bernard S.
Zdroj: Proceedings of SPIE; 3/30/2017, Vol. 10313, p187-189, 3p
Databáze: Complementary Index