Arrayed Lithography Using STM Based Microcolumns.

Autor: Chang, T. H. P., Muray, L. P., Staufer, U., McCord, M. A., Kern, D. P.
Zdroj: Proceedings of SPIE; 3/27/2017, Vol. 10308, p127-158, 32p
Databáze: Complementary Index