| Autor: |
Taku Suyama, Hansin Bae, Kenta Setaka, Hayato Ogawa, Yushi Fukuoka, Haruka Suzuki, Hirotaka Toyoda |
| Předmět: |
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| Zdroj: |
Journal of Physics D: Applied Physics; 11/8/2017, Vol. 50 Issue 44, p1-1, 1p |
| Abstrakt: |
O− ion flux from the indium tin oxide (ITO) sputter target under Ar ion bombardment is quantitatively evaluated using a calorimetry method. Using a mass spectrometer with an energy analyzer, O− energy distribution is measured with spatial dependence. Directional high-energy O− ion ejected from the target surface is observed. Using a calorimetry method, localized heat flux originated from high-energy O− ion is measured. From absolute evaluation of the heat flux from O− ion, O− particle flux in order of 1018 m−2 s−1 is evaluated at a distance of 10 cm from the target. Production yield of O− ion on the ITO target by one Ar+ ion impingement at a kinetic energy of 244 eV is estimated to be 3.3 × 10−3 as the minimum value. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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