Improvements in the imaging performance of a high volume manufacturing EUV scanner, with a special emphasis on the added value of the new illuminator for increased pupil flexibility.
| Autor: | Bilski, Bartosz, Wang, Ziyang, Wittebrood, Friso, McNamara, John, Oorschot, Dorothe, de Kerkhof, Mark van, Fliervoet, Timon |
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| Zdroj: | Proceedings of SPIE; 10/10/2017, Vol. 10446, p1-9, 9p |
| Databáze: | Complementary Index |
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