Thickness determination of TiN and TiAl coatings on steel substrates using X-ray diffraction method and their composition measurements by GD-OES.

Autor: Aliaj, Fisnik Rr., Syla, Naim, Oettel, Heinrich, Dilo, Teuta
Předmět:
Zdroj: Surface & Interface Analysis: SIA; Nov2017, Vol. 49 Issue 11, p1135-1141, 7p
Abstrakt: This paper presents a nondestructive X-ray diffraction method for the accurate determination of thicknesses of polycrystalline TiN and amorphous-like TiAl coatings deposited by DC magnetron sputtering onto thick polycrystalline stainless steel and carbon steel substrates. This method relies on the measurement of intensity loss of a substrate reflection caused by the deposition of the coating. The uncertainty of the thickness measurements by the X-ray diffraction depends on the mass absorption coefficient of the coating material and the quality of the collected diffraction patterns. For the coatings considered, thicknesses determined by the X-ray diffraction method show very good agreement with the thickness values measured by scanning electron microscopy and ball crater techniques. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index