Monitoring non-thermal plasma processes for nanoparticle synthesis.

Autor: Lorenzo Mangolini
Předmět:
Zdroj: Journal of Physics D: Applied Physics; 9/20/2017, Vol. 50 Issue 37, p1-1, 1p
Abstrakt: Process characterization tools have played a crucial role in the investigation of dusty plasmas. The presence of dust in certain non-thermal plasma processes was first detected by laser light scattering measurements. Techniques like laser induced particle explosive evaporation and ion mass spectrometry have provided the experimental evidence necessary for the development of the theory of particle nucleation in silane-containing non-thermal plasmas. This review provides first a summary of these early efforts, and then discusses recent investigations using in situ characterization techniques to understand the interaction between nanoparticles and plasmas. The advancement of such monitoring techniques is necessary to fully develop the potential of non-thermal plasmas as unique materials synthesis and processing platforms. At the same time, the strong coupling between materials and plasma properties suggest that it is also necessary to advance techniques for the measurement of plasma properties while in presence of dust. Recent progress in this area will be discussed. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index