Electron temperature Profiles in Axial Field 2.45 GHz ECR Ion Source with a Ceramic Chamber.

Autor: Abe, K., Tamura, R., Kasuya, T., Wada, M.
Předmět:
Zdroj: AIP Conference Proceedings; 2017, Vol. 1869 Issue 1, p1-6, 6p, 3 Diagrams, 6 Graphs
Abstrakt: An array of electrostatic probes was arranged on the plasma electrode of a 2.45 GHz microwave driven axial magnetic filter field type negative hydrogen (H-) ion source to clarify the spatial plasma distribution near the electrode. The measured spatial distribution of electron temperature indicated the lower temperature near the extraction hole of the plasma electrode corresponding to the effectiveness of the axial magnetic filter field geometry. When the ratio of electron saturation current to the ion saturation current was plotted as a function of position, the obtained distribution showed a higher ratio near the hydrogen gas inlet through which ground state hydrogen molecules are injected into the source. Though the efficiency in producing H- ions is smaller for a 2.45 GHz source than a source operated at 14 GHz, it gives more volume to measure spatial distributions of various plasma parameters to understand fundamental processes that are influential on H- production in this type of ion sources. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index