| Autor: |
Buma, A., Masuda, N., Araki, T., Nanishi, Y., Oda, M., Hitora, T. |
| Předmět: |
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| Zdroj: |
Physica Status Solidi (B); Aug2017, Vol. 254 Issue 8, pn/a-N.PAG, 5p |
| Abstrakt: |
A new lattice-matching substrate material for the growth of AlGaN is proposed. This substrate is prepared by the rf-radical beam-based nitridation of α-(AlGa)2O3, which is grown by mist chemical vapor deposition (CVD). We consider the effect of the nitridation process using reflection high-energy electron diffraction (RHEED), transmission electron microscopy (TEM), scanning transmission electron microscopy-electron energy loss spectroscopy (STEM-EELS) and X-ray photoelectron spectroscopy (XPS). Surface of α-(AlGa)2O3 changed from corundum structure to wurtzite structure of AlGaN by nitridation using rf-radical beam was observed. In addition, we discuss the thermal stability of α-(AlGa)2O3. X-ray diffraction ω-2θ profile to characterize the phase transition was performed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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