High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit.
Autor: | Ruiz, Pablo D., Huntley, Jonathan M. |
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Zdroj: | Proceedings of SPIE; 6/29/2017, Vol. 10329, p1-7, 7p |
Databáze: | Complementary Index |
Externí odkaz: |