The properties of ZnO films obtained by high-frequency magnetron deposition with subsequent vacuum annealing and plasma treatment.
| Autor: | D N Redka, K G Elanskaia, L D Bakhchova |
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| Zdroj: | Journal of Physics: Conference Series; 2017, Vol. 872 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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