| Autor: |
Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, Hidetoshi Saitoh |
| Předmět: |
|
| Zdroj: |
Sensors & Materials; 2017, Vol. 29 Issue 6, Part 2, p817-826, 10p |
| Abstrakt: |
We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
