| Autor: |
Music, Denis, Banko, Lars, Ruess, Holger, Engels, Martin, Hecimovic, Ante, Grochla, Dario, Rogalla, Detlef, Brögelmann, Tobias, Ludwig, Alfred, Von Keudell, Achim, Bobzin, Kirsten, Schneider, Jochen M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 2017, Vol. 121 Issue 21, p1-7, 7p, 2 Color Photographs, 3 Graphs |
| Abstrakt: |
Correlatively employing density functional theory and experiments congregated around high power pulsed magnetron sputtering, a plasma-surface model for metastable Cr0.8Al0.2N (space group Fm3...m) is developed. This plasma-surface model relates plasma energetics with film composition, crystal structure, mass density, stress state, and elastic properties. It is predicted that N Frenkel pairs form during Cr0.8Al0.2N growth due to high-energy ion irradiation, yielding a mass density of 5.69 g cm-3 at room temperature and Young’s modulus of 358–130 GPa in the temperature range of 50–700K for the stress-free state and about 150 GPa larger values for the compressive stress of 4 GPa. Our measurements are consistent with the quantum mechanical predictions within 5% for the mass density and 3% for Young’s modulus. The hypothesis of a stress-induced Young’s modulus change may at least in part explain the spread in the reported elasticity data ranging from 250 to 420 GPa. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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