Effect of substrate thickness on properties of protective antireflection a-C:H films deposited by PECVD.
| Autor: | Fu Kaihu, Zu Chengkui, Jin Yangli, Qiu Yang, Han Bin |
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| Zdroj: | Proceedings of SPIE; 1/31/2017, Vol. 10255, p1-22, 22p |
| Databáze: | Complementary Index |
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