Structure and Properties of Vacuum Arc Single-Layer and Multiperiod Two-Layer Nitride Coatings Based on Ti(Al):Si Layers.

Autor:	Beresnev, V. M., Sobol`, O. V., Pogrebnjak, A. D., Lytovchenko, S. V., Stolbovoy, V. A., Srebniuk, P. A., Novikov, V. Ju., Doshchechkina, I. V., Meylehov, A. A., Postelnyk, A. A., Nyemchenko, U. S., Mazylin, B. A., Kruhlova, V. V.
Předmět:	CRYSTAL structure VACUUM arcs NITRIDES SURFACE coatings TITANIUM compounds SILICON
Zdroj:	Journal of Nano- & Electronic Physics; 2017, Vol. 9 Issue 1, p01033-1-01033-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu