Formation of sensor array on the AFM chip surface by magnetron sputtering.
| Autor: | I D Shumov, S L Kanashenko, V S Ziborov, Yu D Ivanov, A I Archakov, T O Pleshakova |
|---|---|
| Zdroj: | Journal of Physics: Conference Series; 2017, Vol. 789 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|