Trajectory tracking control for pneumatic actuated scan stage with time delay compensation.
Autor: | Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Hara, Atsushi, Saiki, Kazuaki |
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Zdroj: | IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society; 2016, p5125-5130, 6p |
Databáze: | Complementary Index |
Externí odkaz: |