Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample.
| Autor: | V Ju Chebakova, A F Gaisin, V S Zheltukhin |
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| Zdroj: | IOP Conference Series: Materials Science & Engineering; 2016, Vol. 158 Issue 1, p1-1, 1p |
| Databáze: | Complementary Index |
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