Modeling and sliding-mode control of wafer stage in lithrography machines.
| Autor: | Dong, Yue, Liu, Yang, Song, Fazhi, Li, Li, Kang |
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| Zdroj: | 2016 UKACC 11th International Conference on Control (CONTROL); 2016, p1-6, 6p |
| Databáze: | Complementary Index |
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