Transient and quasi-stationary simulation of heat and mass transfer in Czochralski silicon crystal growth.
| Autor: | A. Voigt, C. Weichmann, J. Nitschkowski, E. Dornberger, R. Hölz |
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| Zdroj: | Crystal Research & Technology; Jun2003, Vol. 38 Issue 6, p499-505, 7p |
| Databáze: | Complementary Index |
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