A study on the interaction between barrier and plating causing edge stringer defects in 28nm.
| Autor: | Ramanathan, Eswar, Fiacco, Antonio, Claire, Silvestre Mary, Parks, Val, Rajagopalan, Balajee, Scott, Hildreth, John, Barker, Riendeau, Jeffrey, Laloe, Jean-Baptiste, Smith, Frank |
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| Zdroj: | 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p79-82, 4p |
| Databáze: | Complementary Index |
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