Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning.
| Autor: | Jebri, M.A., Graton, G., El Adel, E.M., Ouladsine, M., Pinaton, J. |
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| Zdroj: | 2016 5th International Conference on Systems & Control (ICSC); 2016, p169-174, 6p |
| Databáze: | Complementary Index |
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