| Autor: |
Kuan-Chen Chen, Kuo-Feng Chiu, Chia-Fu Chen, Cheng-Yang Lien, Yu-Jer Tsai, Ting-Kuei Lien, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai |
| Zdroj: |
Japanese Journal of Applied Physics; Jun2016, Vol. 55 Issue 6S2, p1-1, 1p |
| Abstrakt: |
A VHF H2 plasma was produced by a narrow-gap discharge at high pressures, and the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode at a discharge gap of 10 mm, while a Maxwellian distribution was seen near the center. When the discharge gap was 15 mm, electrons had a Maxwellian distribution independent of the position. It was found that there must be a threshold in the discharge gap for stochastic heating to occur. The plasma potential near the discharge electrode was higher than that near the center of the interelectrode gap, suggesting the existence of negative ions. The simulation using the plasma hybrid code was carried out. The spatial profiles of the density and temperature of electrons were similar to the experimental results. The plasma potential had a hill-like profile that was quite different from the measured one. The negative ion density was negligible. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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