ChemInform Abstract: A Comparison of Silicon Wafer Etching by KOH and Acid Solutions.
| Autor: | DYER, L. D., GRANT, G. J., TIPTON, C. M., STEPHENS, A. E. |
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| Zdroj: | ChemInform; Jan1990, Vol. 21 Issue 4, pno-no, 2p |
| Databáze: | Complementary Index |
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