Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout.
| Autor: | Xiao, Zigang, Lin, Chun-Xun, Wong, Martin D.F., Zhang, Hongbo |
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| Zdroj: | 2016 21st Asia & South Pacific Design Automation Conference (ASP-DAC); 2016, p95-102, 8p |
| Databáze: | Complementary Index |
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