Using one-dimensional radiosity to model neutral particle flux in high aspect ratio holes.
| Autor: | Manstetten, Paul, Filipovic, Lado, Hossinger, Andreas, Weinbub, Josef, Selberherr, Siegfried |
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| Zdroj: | 2016 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS); 2016, p120-123, 4p |
| Databáze: | Complementary Index |
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