Effect of an inhomogeneous insulating film on the capacitance of metal--insulator--semiconductor...
| Autor: | Jauhiainen, Anders, Westberg, David |
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| Zdroj: | Journal of Applied Physics; 10/1/1998, Vol. 84 Issue 7, p3960, 6p |
| Abstrakt: | Reports on a study which analyzed the impact of an insulating film on the capacitance of metal-insulator-semiconductor (MIS) structures. In-depth look at several MIS devices; Details on the electrical characterization of the MIS devices; Methodology used to conduct the study; Results of the study. |
| Databáze: | Complementary Index |
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