Study on evaluation method for surface topography of polishing pad based on optical Fourier transform.
| Autor: | Suzuki, Keisuke, Tajiri, Takahiro, Khajornrungruang, Panart, Mochizuki, Yoshihiro, Hiyama, Hirokuni, Matsuo, Hisanori |
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| Zdroj: | 2015 International Conference on Planarization/CMP Technology (ICPT); 1/1/2015, p1-5, 5p |
| Databáze: | Complementary Index |
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