Micromachined piezoelectric ultrasonic transducer based on dome-shaped diaphragm supported by flat square diaphragm.
| Autor: | Tang, Yongkui, Wang, Yufeng, Zhao, Lurui, Shkel, Anton, Kim, Eun Sok |
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| Zdroj: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p1110-1111, 2p |
| Databáze: | Complementary Index |
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