Comprehensive modelling and experimental verification of air damping coefficients in MEMS of complex geometry.
| Autor: | Laghi, Giacomo, Frangi, Attilio A., Fedeli, Patrick, Gattere, Gabriele, Langfelder, Giacomo |
|---|---|
| Zdroj: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p958-961, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|