Direct writing of thin and thick metal films via micro glow plasma scanning.
| Autor: | Abdul-Wahed, Ahmed M., Roy, Anindya L., Xiao, Zhiming, Takahata, Kenichi |
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| Zdroj: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p443-446, 4p |
| Databáze: | Complementary Index |
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