Calculation of the dynamic characteristics of micro-mirror element based on the thermal micro-actuators.
| Autor: | Evstafyev, Sergey S., Timoshenkov, Sergey P., Korobova, Natalia E., Timoshenkov, Alexey S., Tereshhenko, Anatolij M. |
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| Zdroj: | Proceedings of SPIE; 12/22/2015, Vol. 9668, p966823-1-966823-8, 8p |
| Databáze: | Complementary Index |
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