Technological problems in forming Si waveguide lamellar diffraction gratings and 2D photonic crystals by plasma and wet etching of Si.
| Autor: | Il'in, Aleksandr I., Volkov, Vladimir T., Trofimov, Oleg V., Barabanenkov, Mikhail Yu. |
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| Zdroj: | 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO); 2015, p983-986, 4p |
| Databáze: | Complementary Index |
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